Development of X-Ray and Extreme Ultraviolet (IUV) Optical Devices for Diagnostics and Instrumentation for Various Surface Applications

Bruch, R., Merabet, H., Bailey, M. P., Development of X-Ray and Extreme Ultraviolet (IUV) Optical Devices for Diagnostics and Instrumentation for Various Surface Applications, J. Surf. Intl. Anal., 27 (4), 236-246,